磷酸处理对多孔SiO<sub>2</sub>薄膜质子导电特性和双电层薄膜晶体管性能的影响

磷酸处理对多孔SiO₂薄膜质子导电特性和双电层薄膜晶体管性能的影响

万相¹², 刘阳辉¹, 张洪亮¹

Effects of H₃PO₄ Treated Porous SiO₂ on Proton Conductivity and Performances of EDL-TFTs

WAN Xiang¹², LIU Yang-Hui¹, ZHANG Hong-Liang¹

图3 不同浓度磷酸处理的SiO 2 薄膜的电容-频率曲线a和漏电流曲线b
Fig. 3 Specific capacitance vs frequency characteristics a and gate leakage current b curves of SiO 2 proton conductor treated by H 3 PO 4 solution with different concentrations